RTA - Rapid Thermal Annealing System
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- Category
- Other Machinery & Industry Equipment
ForALL
- Country / Year Established
-
South Korea
/
- Business type
- Others
- Verified Certificate
-
17
| Product name | RTA - Rapid Thermal Annealing System | Certification | - |
|---|---|---|---|
| Category | Other Machinery & Industry Equipment | Ingredients | - |
| Keyword | - | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | Stock | - | |
| Supply type | - | HS code | - |
Product Information
FA-RTP can be profit for the processes that require minimization of process time and thermal buggets of substrated such as thin gate oxidation, rapid annealing of deposited film, etc.
Application
- Generally, AM-OLED, TFT-LCD, Low-K dielectrics, post implanting annealing,
semi-conductor fabrication.
Technology
- Optimized hardware and temperature control
- Excellent temperature uniformity
- Capability of alternative ATM & vacuum process
- 2~4 inch wafer mountable
- Bench top type of compact design (L700mm x W400mm x D450mm)
Specification
- 1 rectangular type process vacuum chamber
- water cooling for chamber wall /radiation shield
- Ni-Au surface coating for reflector
- O-ring sealed sliding door
- Double side radiation heating with halogen lamp
- Ramping ratio of temperature : heating up to 1,000 °C
- Temperature uniformity : Ø2% on 4 inch wafe
- Programmable temp. controller
- 2~4 inch wafer mountable
- Low vacuum pumping system
- Up to three(3) gas lines
- User friendly PLC control with touch panel
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Minsub Oh
- Address
- 1673-22, shilil-dong,, Daeduck-gu, Daejeon, Korea
- Product Category
- Other Machinery & Industry Equipment
- No. of Total Employees
- 1-50
- Company introduction
-
ForALL is a service company with a mission bring customers value through our products and support service.
We capitalize by becoming a regionally recognized brand name with our thin film deposition equipment and quality service.Our goal is for moderate growth and annual profitability while maintaining our sense of humor.
- Main Product
