AURORA - Magnetron Sputtering System
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- Category
- Other Machinery & Industry Equipment
ForALL
- Country / Year Established
- South Korea /
- Business type
- Others
- Verified Certificate
-
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Product name | AURORA - Magnetron Sputtering System | Certification | - |
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Category | Other Machinery & Industry Equipment | Ingredients | - |
Keyword | - | Unit Size | - |
Brand name | - | Unit Weigh | - |
origin | Stock | - | |
Supply type | - | HS code | - |
Product Information
AURORA provides customer with a high quality & reliable thin film
deposition. Magnetron sputtering sources are specially designed for maximum
erosion rate.
AURORA offers a low risk manufacturing solution.
Application
- Dielectric layers(High K) and conductive electrodes for transistor gate
and memory cell, passivation and diffusion barrier, seed layers(metal liners)
and conductive layers for IC interconnection
Technology
- DC, reactive, RF-sputtering system
- Cathodes are DC / RF compatible
- Optimized magnetron source design for a high target utilization
- Substrate pretreatment by means of heating
- Simple & compact system design for small footprint
- User friendly control system
Specification
- 1 process chamber system
- 1 load lock chambers with standard wafer magazines
- Linear sample transfer
- Substrate dimensions up to 8"
- Substrate heating max. 900 °C
- Turbo molecular pump of high-vacuum pumping
- Booster & oil rotary combination pump of low-vacuum pumping system
- Auto pressure control with throttle valve
- Circular or rectangular type of sputter source
- Sputter power DC 300~3000W, RF generator 600W~3000W
with 13.56MHz auto matching box
- Gas delivery module with mass flow controller
- Manual / PC, PLC control including Windows user interface
for fully automatic process control
B2B Trade
Price (FOB) | Negotiable | transportation | - |
---|---|---|---|
MOQ | Negotiable | Leadtime | Negotiable |
Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Minsub Oh
- Address
- 1673-22, shilil-dong,, Daeduck-gu, Daejeon, Korea
- Product Category
- Other Machinery & Industry Equipment
- No. of Total Employees
- 1-50
- Company introduction
-
ForALL is a service company with a mission bring customers value through our products and support service.
We capitalize by becoming a regionally recognized brand name with our thin film deposition equipment and quality service.Our goal is for moderate growth and annual profitability while maintaining our sense of humor.
- Main Product