AURORA - Magnetron Sputtering System

AURORA - Magnetron Sputtering System


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Required Quantity
Place of Origin
Payment Terms
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Production method
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Shipping / Lead Time
Negotiable / Negotiable
Keyword
Category
Other Machinery & Industry Equipment

ForALL

Country / Year Established
South Korea South Korea /
Business type
Others
Verified Certificate

16

DUNS

Product name AURORA - Magnetron Sputtering System Certification -
Category Other Machinery & Industry Equipment Ingredients -
Keyword - Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

AURORA provides customer with a high quality & reliable thin film deposition. Magnetron sputtering sources are specially designed for maximum erosion rate.
AURORA offers a low risk manufacturing solution.

Application

  • Dielectric layers(High K) and conductive electrodes for transistor gate and memory cell, passivation and diffusion barrier, seed layers(metal liners) and conductive layers for IC interconnection

Technology

  • DC, reactive, RF-sputtering system
  • Cathodes are DC / RF compatible
  • Optimized magnetron source design for a high target utilization
  • Substrate pretreatment by means of heating
  • Simple & compact system design for small footprint
  • User friendly control system

Specification

  • 1 process chamber system
  • 1 load lock chambers with standard wafer magazines
  • Linear sample transfer
  • Substrate dimensions up to 8"
  • Substrate heating max. 900 °C
  • Turbo molecular pump of high-vacuum pumping
  • Booster & oil rotary combination pump of low-vacuum pumping system
  • Auto pressure control with throttle valve
  • Circular or rectangular type of sputter source
  • Sputter power DC 300~3000W, RF generator 600W~3000W
    with 13.56MHz auto matching box
  • Gas delivery module with mass flow controller
  • Manual / PC, PLC control including Windows user interface
    for fully automatic process control

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

ForALL

Country / Year Established
South Korea South Korea /
Business type
Others

16

DUNS

President
Minsub Oh
Address
1673-22, shilil-dong,, Daeduck-gu, Daejeon, Korea
Product Category
Other Machinery & Industry Equipment
No. of Total Employees
1-50
Company introduction

ForALL is a service company with a mission bring customers value through our products and support service.
We capitalize by becoming a regionally recognized brand name with our thin film deposition equipment and quality service.

Our goal is for moderate growth and annual profitability while maintaining our sense of humor.

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