OZONE - Plasma Enhanced Atomic Layer Deposition
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- Category
- Other Machinery & Industry Equipment
ForALL
- Country / Year Established
-
South Korea
/
- Business type
- Others
- Verified Certificate
-
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| Product name | OZONE - Plasma Enhanced Atomic Layer Deposition | Certification | - |
|---|---|---|---|
| Category | Other Machinery & Industry Equipment | Ingredients | - |
| Keyword | - | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | Stock | - | |
| Supply type | - | HS code | - |
Product Information
OZONE delivers monolayer precision, critical for leading edge deposition. It offers a cutting edge solution.
Application
- Dielectric layers(High K) and conductive electrodes for transistor gate
and memory cell, passivation and diffusion barrier, seed layers(metal liners)
and conductive layers for IC interconnection
Technology
- In-situ cleaning
- Impurity, pin hole free film deposition
- Excellent step coverage
- Dense, homogene, uniform, stoichiometric films
- Uniquely designed shower head and reactor for gas phase
reaction free
Specification
- Al6061-T6 chamber system
- Reactor for up to 300mm single wafer deposition
- Rotary vane pump & booster pump of low vacuum pumping
systems
- Up stream or down stream auto pressure control
- Particle trap heating up to 600 °C
- Plasma source and 13.56MHz auto matching box
- 1 purge gas line, 3 reactive gas line and 3 organic liquid
source line
- IPC-control including Windows user interface for fully
automatic process control
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Minsub Oh
- Address
- 1673-22, shilil-dong,, Daeduck-gu, Daejeon, Korea
- Product Category
- Other Machinery & Industry Equipment
- No. of Total Employees
- 1-50
- Company introduction
-
ForALL is a service company with a mission bring customers value through our products and support service.
We capitalize by becoming a regionally recognized brand name with our thin film deposition equipment and quality service.Our goal is for moderate growth and annual profitability while maintaining our sense of humor.
- Main Product
