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Category: Electrical Equipment

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APET Co., Ltd.

Country / Year Established: South Korea /

Business type: Others

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TRADE TOWER

DUNS

Minisite Follow Company

PRODUCT DESCRIPTION COMPANY INFORMATION Related Products

Product name	System Feature	Certification	-
Category	Electrical Equipment	Ingredients	-
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origin		Stock	-
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Product Information

Hardware

1. Uniformed and Minimized IPA vapor supplying structure.

Dome shaped drying chamber
6-Injection channel (Double tube)
Two bubbler and expended blubbering surface
Independent controlled two IPA/N2 supply zone with mass flow controller

2. Design flexibility and serviceability thru Modular and 3-D design (Pro-E)

3. Monitoring Capability (Digital DI Water flow meter, MFC)

4. User-friendly software

PLC Controller
Wide Touch Screen (10.4")
4 recipes for RD & 16 recipes for FRD
Indivisible function control is possible thru touch screen

5. Excellent system reliability

MTBF: 608 Hr
MTTR: 3 Hr

Process

1. No Watermark.

2. Excellent particle control

Hydrophilic: less than 10 addition (0.12㎛)
Hydrophobic: less than 30 addition (0.12㎛)

3. Short process time

RD: 290 sec (8")
FRD: 980 sec (8")

4. Excellent impurity control

less than 5 X e 9 atoms/㎠

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Price (FOB)	Negotiable	transportation	-
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APET Co., Ltd.

Minisite Heart

Country / Year Established: South Korea /

Business type: Others

TRADE TOWER

DUNS

President: Deok-ho, Kim

Address: 705-3B, 20-15, Seoku-ri, Dongtan-myeon, Hwaseong-si, Gyeonggi-do, Korea

Product Category: Dish Washers & Sterilizers,Other Rubber Products

No. of Total Employees: 1-50

Company introduction: To Provide the customer with the valuable system created from the worldwide market leading technology, striving for taking the maximum portion of the burden and responsibility of the customer by standing behind the system till the end of the chip production.