Mini Batch Vertical Furnace

Mini Batch Vertical Furnace


Negotiable Min Order Quantity Unit

Required Quantity
Place of Origin
Payment Terms
Negotiable
Production method
Negotiable
Shipping / Lead Time
Negotiable / Negotiable
Keyword
Category
Other Machinery & Industry Equipment

PST Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others
Verified Certificate

16

TRADE TOWER

DUNS

Product name Mini Batch Vertical Furnace Certification -
Category Other Machinery & Industry Equipment Ingredients -
Keyword - Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

Application

  • Diffusion / Oxidation(Wet/Dry) / Annealing / Alloy / LPCVD

Features

  • Mini Batch Type Vertical Furnace
  • Vertical Furnace for 100~300mm wafers
  • 2 I/O Port
  • Boat Rotation Available
  • PFlexibility for S/W upgrade

Specification

Parameters
Unit
Specifications
Wafer size
mm
150 ~ 300
Maximum Temp Zone
°C
1200
Constant Temp Zone
mm
> 500
Temp Uniformity
°C
< ±0.5
Wafer Pitch
mm
6.35 [5.2~9]
Batch Size
#of wfs
50[max 75]
Throughput [4hr Process]
#of wfs/mo
9000
Temp Control
#of zones
4
Temp Control method
TC
Spike, Profile, Cascade
Water Loading System
Manual / Auto

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

PST Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others

16

TRADE TOWER

DUNS

President
YU, JAE AN
Address
451-2 Ipyeong-ri, Majang-myeon, Icheon-si, Gyeonggi-do, 467-812, KOREA
Product Category
Other Machinery & Industry Equipment
No. of Total Employees
1-50
Company introduction

First of all, thank you for visiting PST website.

PST established since 1999 and has been developing semiconductor manufacturing equipment with basis of high technology. Who can achieve the highest technology and satisfaction?
But we are facing to full satisfaction with high technology. We are stepping your side soon.

Main Markets

China China

Main Product

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