Description

Axetris is offering OEM Mass Flow Controllers (MFC) for gases with outstanding value to the customer. MEMS chip technology, measurement accuracy, smart software processing, fast acting valve, highest level in quality and very compact size are making the MFC 2022 the ideal controller for your OEM applications.
MFC 2022 is a mass flow controller featured with both digital and analog input/output interfaces. Its small size makes it the prime choice when space is a limitation. It is the perfect product for customized multi-channel gas flow control e.g. for advanced gas mixing units. The MFC 2022 outputs provides gas flow; temperature and identity information. The digital interface supports configuration of gas and range allowing multi-gas, multi-range calibration.
MFC 2022 high precision PID controller enables direct, fast and accurate control of the valve. The additional valve override functionality allows an immediate setting of the gas flow to the fully open or closed position or any value in-between.
MFC 2022 is based on the Axetris proprietary MEMS technology. The anemometric mass flow chip sensor based on platinum technology offers exceptional performance in accuracy, speed, stability, responsiveness and life time.

Key features

• MEMS based technology
• High accuracy and stability
• Ultra fast response time
• Excellent repeatability and reproducibility
• Fast acting solenoid valve
• Digitally calibrated and temperature compensated
• Exceptional long term behavior
• Compact size
• Multi-gas / multi-range capability
• Digital and analog output
• 24V single supply
• RoHS compliant
• NIST traceable calibration

Main applications

• Single and multiple gas flow control
• Analytical instruments
• Gas chromatography
• Thin-film process control
• Bioreactor controls
• Thermal analysis
• Gas mixing
• Calibration equipment
• Medical equipment
• Fuel cell