200mm Ashing System (DAS2000)

200mm Ashing System (DAS2000)


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Keyword
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Other Machinery & Industry Equipment

Psk Inc.

Country / Year Established
South Korea South Korea / 2007
Business type
Manufacturer
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Product name 200mm Ashing System (DAS2000) Certification -
Category Other Machinery & Industry Equipment Ingredients -
Keyword - Unit Size -
Brand name - Unit Weigh -
origin Stock -
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Product Information

  Introduced in 1997 and designed for photoresist strip providing high productivity and low CoO/CoC performances. Featuring modular design of mainframe and two single type process chambers configured with downstream microwave plasma module on top of each process chamber.

DAS2000 system provides a compact system design with high repeatability and residue free process using microwave plasma source. DAS2000 system integrates the production proven technologies to offer high throughput implant strip and post etch clean process solution. The downstream microwave source delivers the excellent process control and damage free to the underlying exposed film.

DAS2000 system also provides photoresist popping free solution in high dosed implanted process with ISBP (In-Situ Bake Process) which is solely company patented.

DAS2000 Specification
System 6 ~ 8 Inch wafer
Electrical requirement 208 VAC, 3 Phases, 5 Wires
Temp. control range 80~300C 
Dimension (mm) 890W x 1,900D x 1,970H
Transfer system Two cassette stages ,Dual arm robot
Cooling stage One water cooled cooling station
Power Source Microwave 
Software Window NT base
Throughput 120/Hour (Mechanical Throughput) 
Process gas O2,N2 (N2/H2,CF4 is optional)
Application High Energy / Medium Current / High Dose Imp / Gate / Bit Line / Capacitor / Contact / Via / Pad / Descum

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Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

Psk Inc.

Country / Year Established
South Korea South Korea / 2007
Business type
Manufacturer

16

TRADE TOWER

DUNS

President
Park, Kyong-soo
Address
2-12 Seoku-dong, Hwaseong-si, Gyeonggi-do
Product Category
Other Machinery & Industry Equipment
Year Established
2007
Company introduction

"Global Provider for Semiconductor Process Equipment"
During the past 20 years, our dedicated and passionate employees have worked diligently to transform PSK into a domestic leader, and in 2007 PSK finally achieved the #1 global position within our established segment of the semiconductor equipment industry.
We persevered with the IMF crisis of 1997, and were able to withstand the global financial crisis in recent years to emerge as an innovative leader driving future growth through:

1. Aggressive R&D Investments
2. Strategic Marketing
3. Strengthened Process Standardizations
4. Human Resource Development

We view the need for continued focus in these 4 areas, and strongly believe that recent declines in the industry's investment patterns will provide further opportunities for PSK.
2010 is a turning point for PSK to emerge as a "Global Provider for Semiconductor Process Equipment" through evolved and revolutionized technology that will be applied to newly developed products. We are extremely confident that these new opportunities will create the backbone of our next growth momentum.

PSK is developing an in-house HRD program customized to shed old processes and implement an improved HR Engine geared to foster next-generation leaders who will deliver "Growth Beyond Sustainability". This new HR Engine will create new products and business opportunities to help PSK emerge as a global leader within the semiconductor industry.

Main Markets

China China

Japan Japan

Singapore Singapore

Taiwan Taiwan

U.S.A U.S.A

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