Unozawa-Gumi Iron Works Ltd. was established in 1899. Over the century, the company has been accumulating experiences and technology regarding vacuum pumps and blowers. There are a lot of customers who are statisfied with Unozawa products.

TS & TE Dry Vacuum Pump Series

  : TS Series is multi-stage roots type dry vacuum pump and developed by incorporating our vast experience and technology know-how. The dry vacuum pump uses no lubricating oil or sealing water in the gas passage. With a mechanical booster, it is easy to obtain a larger pumping speed and a higher vacuum level. This combination pump set is TE series.

  1) Features

      - High reliability, Clean vacuum, Wide operation range, Low vibration&noise, Leak tight construction, Long maintenance interval

  2) Applications

      - Heat treatment furnace, Vacuum furnace, Load-lock, Device handling system, Vacuum chunk, PVD Process, Sputtering equipment, Ion Plating equipment, Plasma cleaner, Plasma ashing equipment, Silicon crystal pulling, Gas recovery devices, Vacuum drying, De-aerator(Water based), Vacuum packing machine, Vacuum forming machine.

KTS series dry vacuum pump is suitable for use on clean processes. Do not use for explosive, flammable, toxic or corrosive gas.

Please refer to the attached catalogue.