Features

• Electron Beam Source
  (Gun module & Power supply).
• Ion Beam Source
  (Gun module & Power supply).
• Low Vacuum Pump
  (Rotary & Booster pump).
• High Vacuum Pump
  (Oil diffusion or cryo pump).
• Vacuum Gauge (2 Low 1 High range).
• Deposition Control by IC-5. XTC. MDC 360 (based PC).
• Thickness Monitor
  (Physical & Optical type).
• Gas Flow by MFC (Ar, 02, etc).
• Heating System (up to 350).
• Micro heater & Halogen lamp).
• Cooling System (Chiller & Defrost).
• Calotte (Dome & Planetary type).
• Magnetic Fluid Vacuum Feed through (Hallow Shaft type).

Benefits

• Available to the IBAD process for low-temperature thin film coating.
• Reducing of vacuum pumping time by use of Univac's diffusion pump.
• Automatic system control based PC for coating process.
• Excellent uniformity for maximum production yield.
• Easy operation and maintenance.

Applications

Various and useful functions are incorporated into IBAD system for more stable production such as :

• Automatic system control
• APC (Auto Pressure Controller)
• Thin film deposition controller
• Evaporation sourc...

Mechanical influences

• Cleaning of the substrate surface, removing water and hydrocarbons.
• Densification of the growing film.
• Removal of loosely bound molecules during film growth.

Chemical influences

• Increases reactivity of the reactive gas, better control of film stoichiometry
• Allows for higher deposition rate.