YOUNGSIN-RF has been leading domestic RF device area by investigating in research and development since 1989, despite lack of fundamental material industrial and its theoretical background in KOREA.
We have enhanced productivity and simplified maintenance, which have result in a competitive price. By manufacturing various RF generator and matcher models varying 40W ~ 5KW, we provide our products from laboratory to mass production line not only domestic but also abroad. 

YSR RF Generator 5KW Package

This package includes:

• RF Power Generator - YSR-50MC

• Auto Matching Network Unit - AMN-150A-FA

• Auto matching control software(If requested)

*it’s possible to select one to purchase

Description 

YSR-50MC

YSR-50MC is the 5KW RF Generator YOUNGSIN-RF developed. Due to modular design, it’s possible to reduce lead time. Using high quality and qualified parts, long product life is guaranteed and chance of malfunction is minimalized. Multi protection functions is added for reliability of the product. That’s why this product can be utilized in various and specific applications, such as CVD(PE-CVD, ICP-CVD), PEALD, Etcher(RIE, ICP-RIE), Asher, RF Sputter, Atmospheric Pressure Plasma and so on. 

AMN-150A-FA is the Matching Network Unit which is rated at 5KW max. Due to modular design, it’s possible to reduce lead time. Using high quality and qualified parts, long product life is guaranteed and chance of malfunction is minimalized.

About matching control, because of Preset Matching position, Auto Matching control within 2 seconds can be fully operational. In addition, Full digital Matching Software can enable users to adjust Matching position value more precisely.

Specifications