YSR RF Generator 3KW Package RF Generator Matcher


Negotiable Min Order Quantity Unit

Required Quantity
Place of Origin
South Korea
Brand name
YSR-RF03K, AMN-130A-FA
Payment Terms
Negotiable
Production method
Negotiable
Shipping / Lead Time
Negotiable / Negotiable
Keyword
matching, power supply, rf generator, flat panel display
Category
Industrial Power Supply

YOUNGSIN RF

Membership
PRO
Country / Year Established
South Korea South Korea / 1989
Business type
Manufacturer
Verified Certificate

8

DUNS

Product name YSR RF Generator 3KW Package RF Generator Matcher Certification -
Category Industrial Power Supply Ingredients -
Keyword matching , power supply , rf generator , flat panel display Unit Size -
Brand name YSR-RF03K, AMN-130A-FA Unit Weigh -
origin South Korea Stock -
Supply type - HS code 850440

Product Information

 

YOUNGSIN-RF has been leading domestic RF device area by investigating in research and development since 1989, despite lack of fundamental material industrial and its theoretical background in KOREA.
We have enhanced productivity and simplified maintenance, which have result in a competitive price. By manufacturing various RF generator and matcher models varying 40W ~ 5KW, we provide our products from laboratory to mass production line not only domestic but also abroad. 

 

YSR RF Generator 3KW package

This package includes:

RF Power Generator - YSR-RF03K
 

Auto Matching Network Unit - AMN-130A-FA
 

Auto matching control software(If requested)

*it’s possible to select one to purchase

Description

YSR-RF03K(RF Generator)

 YSR-RF03K is the 3KW RF Generator YOUNGSIN-RF developed. Due to modular design, it’s possible to reduce lead time. Using high quality and qualified parts, long product life is guaranteed and chance of malfunction is minimalized. Multi protection functions is added for reliability of the product. That’s why this product can be utilized in various and specific applications, such as CVD(PE-CVD, ICP-CVD), PEALD, Etcher(RIE, ICP-RIE), Asher, RF Sputter, Atmospheric Pressure Plasma and so on.
 

AMN-130A-FA(Matching network Unit)

AMN-130A-FA is the Matching Network Unit which is rated at 3KW max. Due to modular design, it’s possible to reduce lead time. Using high quality and qualified parts, long product life is guaranteed and chance of malfunction is minimalized. About matching control, because of Preset Matching position, Auto Matching control within 2 seconds can be fully operational. In addition, Full digital Matching Software can enable users to adjust Matching position value more precisely.

 

Benefits & Features

 

YSR-RF03K

 

  • Modular Design to reduce lead time.
  • User-friendly Operation mode including Step 1,2,3 mode.
  • VFD screen to check RF power status in real time.
  • Various applications- CVD(PE-CVD, ICP-CVD), PEALD, Etcher(RIE, ICP-RIE), Asher, RF Sputter, Atmospheric Pressure Plasma. 
  • Use of AMP module for stable and high RF power delivery.   
  • Multi protection functions- Sensor detection against over RF power, over voltage, over heat and the rest.

 

AMN-130A-FA

 

  • Possible to select Full Digital Matching method.
  • Matching Speed: Auto Matching within 2seconds. 
  • Use of Stepping Motor to upgrade accuracy and speed.
  • Possible to adjust matching control positions on self-developed Full Digital Matching Software.

 

Specifications

 

YSR-RF03K- 3KW RF Generator

Input Voltage

220V

Output RF power

3KW

Impedance

50[Ω]

Frequency

2MHz/4MHz/13.56MHz/27.12MHz/40.68MHz

Size

[W]483mm×[H]177mm× [D]543mm

Weight

34KG

Cooling Method

Water cooling

RF out put connector

7/16 Din Type

Communication Protocol

ANALOG Subminiature 15pin D-Sub & RS232 subminiature 9pin D-Sub

Power Mode

SMPS(Switch Mode Power Supply)

*It’s possible to customize the product on request.



 

AMN-130A-FA- Matching Network Unit

RF Power Range

10W~3KW

Impedance

50[Ω]

Frequency

2MHz/4MHz/13.56MHz/27.12MHz/40.68MHz

Size

[W]280mm × [H]150mm × [D]350mm

Weight

10KG

Cooling Method

Water cooling

Tuning Range

10~1000[Ω]

RF output Connector

Connector / CERAMIC/ Copper/ Bar

Load/Tune

VVC 2ea

Matching Control

Digital Matching control

*It’s possible to customize the product on request.

 

 

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

YOUNGSIN RF

Country / Year Established
South Korea South Korea / 1989
Membership
PRO
Business type
Manufacturer

8

DUNS

President
Yeongcheol Seo
Address
5F Young Sin B/D, 38-5, Okum-Dong, Songpa-Gu, Seoul 138855, Republic Of Korea.
Product Category
Industrial Power Supply
Year Established
1989
No. of Total Employees
1-50
Company introduction

http://rf-gen.com/

YOUNGSIN-RF has been leading domestic RF device area by investigating in research and development since 1989, despite lack of fundamental material industrial and its theoretical background in KOREA.
We have enhanced productivity and simplified maintenance, which have result in a competitive price. By manufacturing various RF generator and matcher models varying 40W ~ 5KW, we provide our products from laboratory to mass production line not only domestic but also abroad. 

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