2-tube Vertical LPCVD/Furnace system
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- South Korea
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- vertical furnace/lpcvd, oxi/silicon nitride, stoichiometric silicon nitride process, wet oxidation
- Category
- Vacuum Equipment & Parts
ULTECH
South Korea
- Verified Certificate
-
16
| Product name | 2-tube Vertical LPCVD/Furnace system | Certification | - |
|---|---|---|---|
| Category | Vacuum Equipment & Parts | Ingredients | - |
| Keyword | vertical furnace/lpcvd , oxi/silicon nitride , stoichiometric silicon nitride process , wet oxidation | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | South Korea | Stock | - |
| Supply type | - | HS code | - |
Product Information
[ Model ]
-. VLF-008
[ Specification ]
-. Tube#1 - Wet oxidation
-. Tube#2 – Silicon nitride LPCVD
-. 12inch wafer, 50 wafers/batch (include
dummy)
-. 3-zone heater, max.1200℃
-. Quartz reactor + inner tube
-. Quartz pedestal & boat up/down (motor)
-. Dry pump
-. Throttle valve + APC controller
-. Heating mantle for H2O (3000cc)
-. MFC: Tube#1 - O2(10slm),N2(10slm),
O2(1slm)
Tube#2 - DCS(1slm), NH3(1slm),
N2(5slm), N2(500sccm)
-. PC control
[ Application ]
-. Stoichiometric silicon nitride process
-. Wet oxidation
- Product Info Attached File
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- SUK, CHANG-GIL
- Address
- 17, Seongseogongdan-ro 11-gil, Dalseo-gu, Daegu, Korea, 704-240
- Product Category
- Vacuum Equipment & Parts
- Year Established
- 1998
- No. of Total Employees
- 1-50
- Company introduction
-
ULTECH was formed in 1998 by a group of individuals with extensive experience in the semiconductor manufacturing system. ULTECH is a process equipment company that develops and manufactures a wide variety of deposition, etching, and surface treatment systems. It’s the people that make the difference at ULTECH. We care about our customers and our products.ULTECH consists of engineers who have technology and dream for the future. ULTECH endeavors all our technology and dreams to develop the high-performance semiconductor/MEMS manufacturing equipment. ULTECH promises that ULTECH will concentrate all his/her abilities to provide you the high-performance and low cost equipments which give you a high competitive power and priority in semiconductor and MEMS industry.
- Main Markets
-
China
India
Tunisia
- Main Product
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