Evaporation system

Evaporation system


Negotiable Min Order Quantity Unit

Required Quantity
Place of Origin
Payment Terms
Negotiable
Production method
Negotiable
Shipping / Lead Time
Negotiable / Negotiable
Keyword
evaporation, evaporator, thermal, e-beam
Category
Other Machinery & Industry Equipment

VTS Corporation.

Membership
BIZ
Country / Year Established
South Korea South Korea / 2003
Business type
Manufacturer
Verified Certificate

16

TRADE TOWER

DUNS

Product name Evaporation system Certification -
Category Other Machinery & Industry Equipment Ingredients -
Keyword evaporation , evaporator , thermal , e-beam Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

Outline

Thermal & E-beam evaporation system of the VTS corporation is modular design configured to suit avariety of thin film deposition application for R&D.

 

 

General specification

1. Source materials: Metal(Pt, Au, Cr, Ni, etc) & Oxide

2. Substrate materils: Si, Glass, etc.

3. Substrate size: Max 4inch single wafer

4. Ultimate pressure: ≥ 2E-6 torr

5. E-beam source: 4.5cc, 4pockets / 3.3kW power

6. Thermal source: Resistance boat type 2sets / 2kW

7. Uniformity: ≤±3℃at 4inch wafer, Ni

8. System dimension: Approx. 1300W x 800D x 1800H (mm)

 

Model

1. DaON1000T

    Thermal Evaporation system

2. DaON1000E

    E-beam Evaporation system

3. DaON1000TE

    Thermal & E-beam Evaporation system

 

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

VTS Corporation.

Country / Year Established
South Korea South Korea / 2003
Membership
BIZ
Business type
Manufacturer

16

TRADE TOWER

DUNS

President
Wonho Jung
Address
1331 Gwanpyung Dong Yusung Gu Daejeon KOREA
Product Category
General Industrial Equipment,Industrial Supplies,Machinery & Parts
Year Established
2003
No. of Total Employees
1-50
Company introduction

VTS Corporation is manufacturer of LED, Solar, Touch screen panel peocess equipments.

We suppy MOCVD system for LED, Screen printer and firing furnace fo Solar and Roll to roll sputtering system for Touch Screen Panel productions...

Main Markets

China China

India India

Indonesia Indonesia

Japan Japan

Malaysia Malaysia

Pakistan Pakistan

Singapore Singapore

South Korea South Korea

Taiwan Taiwan

U.S.A U.S.A

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