Sputter system
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- research, sputtering, vacuum, deposition
- Category
- Other Machinery & Industry Equipment
VTS Corporation.
- Verified Certificate
-
16
| Product name | Sputter system | Certification | - |
|---|---|---|---|
| Category | Other Machinery & Industry Equipment | Ingredients | - |
| Keyword | research , sputtering , vacuum , deposition | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | Stock | - | |
| Supply type | - | HS code | - |
Product Information
Outline
R&D sputter equipment made by VTS corporation is for research characteristics of the thin film and develop devices to be used for a face Co-sputtering system for making multi-layer.
It is equipped with three sputter source in the bottom plate and a heating unit to allow heating the plate up to 650℃ in radiation type and has a structure to provide rotation motion to improve thickness uniformity.
General specification
1. Substrate size: 4inch single substrate
2. Substrate heating: Up to 650℃
3. Substrate heating uniformity: ≤±5℃ at set value
4. Ultimate presuure: ≥ 2E-6 torr
5. Deposition type: Co-sputtering (3sets)
6. Target size: 4inch
7. Power supply: DC 1kW(2sets) / RF 300W(1set)
8. System Dimension: Approx. 1300W x 800D x 1800H (mm)
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Wonho Jung
- Address
- 1331 Gwanpyung Dong Yusung Gu Daejeon KOREA
- Product Category
- General Industrial Equipment,Industrial Supplies,Machinery & Parts
- Year Established
- 2003
- No. of Total Employees
- 1-50
- Company introduction
-
VTS Corporation is manufacturer of LED, Solar, Touch screen panel peocess equipments.
We suppy MOCVD system for LED, Screen printer and firing furnace fo Solar and Roll to roll sputtering system for Touch Screen Panel productions...
- Main Markets
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China
India
Indonesia
Japan
Malaysia
Pakistan
Singapore
South Korea
Taiwan
U.S.A
- Main Product
