FEATURES

* Liquid supply system and tools used for semiconductor and all processing

* Compact, Easy to use

* Extremely low internal volume

* 0 to 5VDC output models available

* Cleaning and package in CAS semiconductor's Factory

* "CE" & "S" marks approved

SPECIFICATIONS

1. Model : CAS-FM Series

2. Liquid : All Liquid (D.I water, FC-3283,Galden, etc)

3. Range

          Standard, 1~250 LPM

          Different Range Available

4. Accuracy : ± 0.5 % of Full scale

5. Operating Temperature : -40~150°c

                                   Option : -100~250°c

6. Humidity : 0 to 95% RH

7. Power : 24 VDC with reserve polarity protection

8. Output : 0~5VDC

9. Electromagnetic compatibility (EMC & EMI)

          " S" - according to EN55011 : 1998/A1:1999/A2:2002

                      & EN61000-6-2:2001

10. Material :

        Body : Stainless Steel 316L

        Sensor : Aluminum

11. Sensor Type : Pick-up Sensor, Hall Sensor