AKTECH Co., Ltd.
- Country / Year Established
-
South Korea
/
- Business type
- Others
- Verified Certificate
-
12
| Product name | Rectangular Gate Valve -Heated Type | Certification | - |
|---|---|---|---|
| Category | Valves | Ingredients | - |
| Keyword | - | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | Stock | - | |
| Supply type | - | HS code | - |
Product Information
RECTANGULAR GATE VALVE -Heated Type
Application
- Where heating is required, heated housing and blade heating is optional
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- All other cluster vacuum systems
Features
- Heated gate (or heated gate and housing) to reduce particulate buildup
- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
Options
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Specification
|
Pressure range
|
1x10-9mbar.l/s
|
|
|
Leak rate:body, seat
|
<1x10-9mbar.l/s
|
|
|
Differential pressure on the gate
|
<1.2 bar in either direction
|
|
|
Material
|
Valve body, bonnet seal, blade
|
AL6061
|
|
Welded bellows
|
AM350
|
|
|
Valve actuator
|
SS304, AL6061
|
|
|
Seal Materials
|
KALREX
|
|
|
Temperature
|
Valve body
|
180°C
|
|
Valve actuator
|
100°C
|
|
|
Operation
|
Double acting
|
|
|
Cycle until first service
|
>1 million
|
|
|
Position sensor(open/close)-Reed switch
|
Honeywell(11SM-244-T, JS-5)
|
|
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Yongdae Kim
- Address
- #332-2 Woncheon-dong, Yeongtong-gu,, Sunwon-si, Gyeonggi-do, Korea
- Product Category
- Pumps,Valves
- No. of Total Employees
- 1-50
- Company introduction
-
Greeting
I am Kim Yong-Dae, the CEO of AK Tech.Under our motto, "providing projects and services with perfect quality beyond customer's expectation, "AK Tech has been supplying products to domestic and overseas semiconductor device makers. Our reputation is getting recognized more and more in the semiconductor industry.
All our members have been endeavoring for R&D and accumulating unique know-how in the core fields of semiconductor parts - Bellows, Valve, Heater, Magnetic seal and RPS.
At present as technological environment in the semiconductor industry changes drastically, we are committed to researching and developing the core semiconductor parts.
AK Tech will keep on investing and hard working until we become world's best semiconductor parts company.
Please, give us support and affection until that day.
- Main Product
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