AKTECH Co., Ltd.
- Country / Year Established
-
South Korea
/
- Business type
- Others
- Verified Certificate
-
12
| Product name | Remote Plasma Control Valve | Certification | - |
|---|---|---|---|
| Category | Valves | Ingredients | - |
| Keyword | - | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | Stock | - | |
| Supply type | - | HS code | - |
Product Information
Remote Plasma Control Valve
Application
- High vacuum process
- All CVD process (including MO, PE, HDP, LP and AP)
- Photovoltaic and semiconductor application
Features
- Pneumatic actuation
- Rated for 1 million cycles
- Double o-ring seal
- Easy maintenance
Options
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Specification
|
Pressure range
|
1x10-8mbar.l/s
|
|
|
Leak rate:body, seat
|
<1x10-9mbar.l/s
|
|
|
Differential pressure on the gate
|
<1.5 bar in either direction
|
|
|
Material
|
Valve body, bonnet seal, blade
|
AL6061
|
|
Welded bellows
|
||
|
Valve actuator
|
AL6061
|
|
|
Seal Materials
|
CHEMRAZ
|
|
|
Temperature
|
Valve body
|
150°C
|
|
Valve actuator
|
100°C
|
|
|
Operation
|
Double acting
|
|
|
Cycle until first service
|
>1 million
|
|
|
Position sensor(open/close)-Reed switch
|
Honeywell(11SM-244-T, JS-5
|
|
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Yongdae Kim
- Address
- #332-2 Woncheon-dong, Yeongtong-gu,, Sunwon-si, Gyeonggi-do, Korea
- Product Category
- Pumps,Valves
- No. of Total Employees
- 1-50
- Company introduction
-
Greeting
I am Kim Yong-Dae, the CEO of AK Tech.Under our motto, "providing projects and services with perfect quality beyond customer's expectation, "AK Tech has been supplying products to domestic and overseas semiconductor device makers. Our reputation is getting recognized more and more in the semiconductor industry.
All our members have been endeavoring for R&D and accumulating unique know-how in the core fields of semiconductor parts - Bellows, Valve, Heater, Magnetic seal and RPS.
At present as technological environment in the semiconductor industry changes drastically, we are committed to researching and developing the core semiconductor parts.
AK Tech will keep on investing and hard working until we become world's best semiconductor parts company.
Please, give us support and affection until that day.
- Main Product
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