Standard ICP-RIE System
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- Category
- Other Machinery & Industry Equipment
SNTEK Co.,Ltd.
- Country / Year Established
-
South Korea
/
- Business type
- Others
- Verified Certificate
-
16
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| Category | Other Machinery & Industry Equipment | Ingredients | - |
| Keyword | - | Unit Size | - |
| Brand name | - | Unit Weigh | - |
| origin | Stock | - | |
| Supply type | - | HS code | - |
Product Information
Features
IRS5000 High density plasma etching system is a standard type that supports the application of general metal & dielectric material film & III-V compound Material etching process for the field of semiconductor, Optical, Nano and MEMS Device.
Application
- Metal etching
- Al2O3, Si, SiO2, Si3N4 Etching
- Ashing Process
- MEMS Application
Specifications
- Plasma Source : Specially Designed Antenna Module for High Density Plasma
- Sample Capacity : 4", 6" Wafer
- Source(ICP) Power : RF 1000W
- Bias Power : RF 600W
- High Vacuum Pumping system : Turbo Molecular Pump + Mechanical Rotary Pump
- Sample Loading/Unloading : Vacuum Load-lock system
- Full Automation system(optional)
- Plasma Density : > 5 x 1011/cm3
- Ultimate Pressure : < 5 x 10-6 Torr within 1 hour
- Etching Uniformity : <± 5% at 6 inch Area
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- K. J Ahn
- Address
- #987-1, Gosaek-dong, Gwonsun-gu, Suwon-si, Gyeonggi-do, Korea
- Product Category
- Other Machinery & Industry Equipment
- No. of Total Employees
- 1-50
- Company introduction
-
Business Ideas.
Passion: Making a work delightful while smile is originated from the delight, vitalizing the organization.
Innovation: Breaking from the convention, innovative and creative thinking warrants distinguished business of management and technology
Faith: Every human relation is developed and based on faith.
Customer delight and satisfaction will make a customer be faithful.VISION.
* Blue Chip Business of Plasma Process Equipment in 2010
SNTEK is specialized in the applied plasma technology, which is the core of semiconductor and display device, ambitiously setting a goal to be the top plasma core process device manufacturing maker through the ceaseless R&D activities and creating the maximized value for employees and investors.
*In 2015, the corporation aims to be the world's best high tech device manufacturer.
SNTEK will continue to develop applied plasma technology to be the state-of-the-art plasma device maker in the world's next generation industry, as one of the world's leading businesses.
- Main Product
